Khabib Shukurullayevich Abdullayev. “MECHANICAL PROCESSING OF SILICON SUBSTRATE, SURFACE CLEANING WITH ABRASIVE MATERIALS”. Web of Technology: Multidimensional Research Journal, vol. 2, no. 9, Sept. 2024, pp. 102-8, https://webofjournals.com/index.php/4/article/view/2193.