MECHANICAL PROCESSING OF SILICON SUBSTRATE, SURFACE CLEANING WITH ABRASIVE MATERIALS
Keywords:
Semiconductor devices, integrated circuits, local diffusion, thermoelectric properties of porous SiNWs, silicon substrate, silicon oxide, doping, polishing, oxidation, photolithography, p-n junctions.Abstract
This paper explores the processing of silicon substrates in microelectronics, specifically mechanical processing, polishing, oxidation, and other treatments, as well as the theoretical modeling of the thermoelectric properties of porous SiNWs.
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Published
2024-09-30
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Khabib Shukurullayevich Abdullayev. (2024). MECHANICAL PROCESSING OF SILICON SUBSTRATE, SURFACE CLEANING WITH ABRASIVE MATERIALS. Web of Technology: Multidimensional Research Journal, 2(9), 102–108. Retrieved from https://webofjournals.com/index.php/4/article/view/2193
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